| Numéro |
EPJ Web Conf.
Volume 157, 2017
22 Topical Conference on Radio-Frequency Power in Plasmas
|
|
|---|---|---|
| Numéro d'article | 03062 | |
| Nombre de pages | 4 | |
| Section | Standard Papers | |
| DOI | https://doi.org/10.1051/epjconf/201715703062 | |
| Publié en ligne | 23 octobre 2017 | |
https://doi.org/10.1051/epjconf/201715703062
RF plasma generation in the chamber with the conducting walls
1 Joint Institute for High Temperatures of the Russian Academy of Sciences (JIHT RAS), 125412, Moscow, Russia
2 Moscow Institute of Physics and Technology (MIPT), 141701, Dolgoprudny, Moscow Region, Russia
* Corresponding author: raraavis@ihed.ras.ru
Published online: 23 October 2017
This work is devoted to study of inductively coupled RF discharge within a metal chamber with a diameter of about 1 m and a length of about 2 m in argon gas (RF frequency is 5.28 MHz). The spatial distributions of electron temperature and density depending on the magnetic induction (from 0 to 0.2 T), plasma-forming gas pressure (0.1 − 10 mTorr) and RF power absorbed in the plasma are presented. For fixed gas pressure (6 mTorr) electron temperature decrease with increasing of magnetic field was found.
© The authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.