RF plasma generation in the chamber with the conducting wallsAndey Gavrikov, Sergey Kuzmichev, Gennadiy Lizyakin, Valentin Smirnov, Rinat Timirkhanov, Ravil Usmanov et Nazar VoronaEPJ Web Conf., 157 (2017) 03062DOI: https://doi.org/10.1051/epjconf/201715703062
